The oil-sealed DVE vacuum pump is the rotary vane DVE vacuum pump, which is generally the front stage DVE vacuum pump of the vacuum unit. This kind of pump compresses various mixed gases to atmospheric pressure and discharges them into the exhaust pipe in the range of 60~100℃.

If the pressure, concentration, and temperature of the hazardous products in the pump are relatively high, these substances accumulate in the pump and the accessories of the pump, and these substances contact the surrounding air in the exhaust pipe, etc., which will constitute potential hazards.

For the hazardous gases used or generated in semiconductor manufacturing, appropriate measurement methods must be taken to prevent fire and explosion, to ensure the normal operation of the equipment, and to prevent acute or chronic poisoning of operators, maintenance personnel and service personnel. For safety reasons, suitable DVE vacuum pumps and accessories with sufficient pumping power should be equipped, and reasonable operation and maintenance methods should be adopted, and appropriate monitoring devices should be equipped.
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